There are many subsystems involved in electronic production enterprises, which provide all-weather operation and control of key systems with more reliable and economic schemes for exchanging information of the whole plant, improving overall management performance, simplifying operation and maintenance difficulty, reducing management cost, and making use of Ethernet, controller, communication equipment and other monitoring data of all systems of factory facilities to form the whole plant monitoring, which is not available to the subsystem Seam integration.

The system has monitoring and control functions at all levels and monitors all subsystems, including clean room, air conditioning, ultra pure water, sewage treatment, chemical supply, vacuum system, pow